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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Best Semiconductor Material For  Etching Gas
  • Best Semiconductor Material For  Etching Gas

Best Semiconductor Material For Etching Gas

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Basic Info

Model No.: Hexafluoroethane

Manufacturing Technology: Optoelectronic Semiconductor

Material: Element Semiconductor

Type: N-type Semiconductor

Package: SMD

Application: Refrigerator

Model: ST

Additional Info

Place of Origin: CN

Product Description

半导体材料

Hexafluoroethane (C2F6), also known as perfluoroethane, is a tasteless, colorless, non-flammable inert gas. The melting point of hexafluoroethane is -100.6℃, the boiling point is -78.2℃, slightly soluble in water. Hexafluoroethane, as a dry etch agent, has the advantages of very small edge erosion, high etching rate and high accuracy, and can meet the requirements of the process with small line width.

半导体材料

Items

Unit

Indexs

C2F6

Vol.%

≥99.999

O2+Ar

Vol.ppm

<1

N2

Vol.ppm

<5

CO

Vol.ppm

<0.5

CO2

Vol.ppm

<0.5

H2

Vol.ppm

<0.5

Halohydrocarbon

Vol.ppm

<5

CH4

Vol.ppm

<1

H2O

Vol.ppm

<2

Acidity(Measured by HF)

Wt.ppm

<0.1

Total impurity content

Mol.ppm

≤10

Application

Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.

Packaging and storage

Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.

萤石1

Shandong Zhongshan Photoelectric Materials Co., Ltd. is a high-tech enterprise invested and established by Shandong Zhongshan Group Co., Ltd., which integrates R&D, pilot test and industrialization. Zhongshan Photoelectric Materials Co., Ltd. There is a research and development team of more than 200 people, mainly including professors,postdocs,doctors, researchers, masters and undergraduates. In just a few years, the company has made a number of innovative technological achievements.In the last three years, we have applied for more than 50 patents and granted 30 invention patents.

The company set up a 5,000 square meters of R&D pilot platform, including a number of complete supporting facilitiesfunc advanced tion of test and pilot devices, such as special functional fluorinated carbon materials, High Pure Fluorine gas, semiconductor materials(high pure electronic gas/ electronic chemicals), Lithium Battery electrolytes and additives,high specific energy battery, thermal battery and related materials, photoelectric materials, stable isotope and its derivative materials, fluoridated biomedical materials, etc. The company can conduct a number of innovative rr&d tests and pilot new materials and equipment related areas. The company has established an advanced analysis and test center for R&D and production of all the projects.

In the meantime,the company has established the first large-scale Fluorographene production line and functional fluorocarbon material performance assessment laboratory worldwide, and it is now the only manufacturer capable of producing and supplying high quality fluorographene in large quantities both domestically and internationally.

萤石2


萤石9

Looking for ideal Semiconductor Material With Superior Performance Manufacturer & supplier ? We have a wide selection at great prices to help you get creative. All the Etching Gas For Semiconductor are quality guaranteed. We are China Origin Factory of Semiconductor Materials Compound. If you have any question, please feel free to contact us.

Product Categories : Semiconductor Material > Hexafluoroethane

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