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Fluorine-containing electronic special gas

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Best Semiconductor Material For Etching Gas

ZSEM main Semiconductor process materials are fluoride etching gases such as fluorine-containing electronic special gases. Currently available large-scale supplies include trifluoromethyl iodide (CAS: 2314-97-8) and Xenon Difluoride (CAS: 13709-36) -9 ), boron trifluoride 11, Perfluorobutadiene (CAS: 685-63-2), Chlorine Trifluoride (CAS: 7990-91-2), Nitrogen Trifluoride (CAS: 7783-54- 2) Germanium Tetrafluoride (CAS:7783-58-6), Titanium Tetrafluoride (CAS:7783-63-3), Tungsten Hexafluoride (CAS:7783-82-6), Molybdenum Hexafluoride ( CAS:7783-77-9), sodium trifluoromethanesulfinate (CAS:2926-29-6), etc.

Fluorine-containing electronic special gas

Hexafluoroethane