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Model No.: Diborane
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Diborane Electronic Specialty Gases Electronic Industry Dopant Semiconductor Materials
Product introduction Diborane has a molecular formula of B2H6 and a relative molecular weight of 27.67. Diborane is a kind of colorless, flammable, labile and high toxic gas with disgusting fireworks smell and sweet taste at normal conditions (15℃, 101.325kPa). Diborane is a very reactive compound that is unstable at room temperature and decomposes slowly to form a variety of borohydrides in different contents, hydrogen is generated at same time. Diborane hydrolyzes immediately encountering with water, generating boric acid and a large amount of hydrogen. Diborane11 is used as dopant for gaseous impurity source, ion implantation and boron doped oxide diffusion in the electronic industry. Quality Specification Items Units Index Dib orane11≥ Vol.% 99.99 CH4+C2H6,≤ ppm 80 Nitrogen≤ ppm 10 Diborane can be used in microelectronics, flat panel display, solar cells, LED, optical fiber, medicine, nuclear power and other fields, also can be used as polymerization catalyst, high energy fuel of rocket and missile. Diborane11 is a p-doped source of silicon used in semiconductor manufacturing, epitaxial growth, passivation, diffusion, and ion implantation of silicon and germanium. Packaging and storage Diborane11 is stored in stainless steel cylinders, pure diborane11 in the cylinder decomposes 10%~20% a month at room temperature, diborane11 can be stored a few months and the decomposition rate is much lower in low temperature, but storage temperature of diborane11 should not be lower than -80℃. Storage area shall be away from open flame, spark and heat source, and shall be equipped with equipment for emergency.
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Product Categories : Stable Isotope Materials > Materials Stable Isotope
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