Product introduction
At normal temperature and pressure, boron trichloride(BCl3) is colorless smoke gas, which is flammable, pungent, acidic odor. Boron trichloride decomposes into hydrochloric acid and boric acid and releases a lot of heat encountering with water, it generates smoke in wet air because of hydrolysis, and BCl3decomposes into hydrochloric acid and boric acid ester in alcohol. Boron trichloride has a strong reaction ability and can form a variety of coordination compounds. Boron trichloride can react with glass and ceramic when heated, and it also reacts with many organic compounds to form a variety of organoboron compounds. High purity boron11 trichloride is mainly used for diffusion doping in the manufacturing process of (silicon) semiconductor devices. Boron impurities are generated through decomposition of BCl3and diffuse toward silicon to form p-type semiconductor at high temperature. BCl3 can also be used for dry etching of Al, MoSi2, TaSi2, TiSi2, WSi and other materials.
Quality Specification
| items | Units | Index |
| Boron11 Trichloride≥ | Vol.% | 99.9995 |
| Oxygen+Argon< | Vol.ppm | 1 |
| Nitrogen< | Vol.ppm | 4 |
| Ca rbon monoxide< | Vol.ppm | 0.5 |
| Carbon dioxide< | Vol.ppm | 0.2 |
| Methane < | Vol.ppm | 0.5 |
|
Total impurity content≤ | Vol.ppm | 5 |
| Metal ion | Vol.ppm |
Supply and demand agreement |
Application
Boron trichloride can be used to manufacture high pure boron, catalyst for organic synthesis, fluxing agent for silicate decomposition, and it also used as additive of deoxidizer, nitrides and carbides in alloy refining. High pure boron11 trichloride is mainly used in diffusion doping, ion implantation, dry etching and other processes in semiconductor devices and integrated circuit manufacture.
Packaging and storage
Boron11 trichloride is filled in the cylinder. The cylinder filled with boron11 trichloride conforms to the relevant provisions of GB14193. The packaging specifications include 10L and 47L.The product is stored in a shady, dry and ventilated storeroom below 60℃. It is forbidden to expose to the sun and keeps away from heat sources. The package must be sealed and it should be separately stored with alkali and other hazardous articles.
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