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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Carbonyl fluoride CAS: 353-50-4 CF2O
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Carbonyl fluoride CAS: 353-50-4 CF2O Hight Purity For Etching Chemicals Agent
Product introduction
Molecular weight of carbonyl fluoride(CF2O) is 66.01 and its melting point is -114 ℃, boiling point is -84 ℃. Carbonyl fluoride is a kind of highly toxic and irritating gas with highly corrosive which has a strong stimulating effect on skin and respiratory tract mucosa, it can dissolve in water and ethanol, decompose in water and release highly toxic corrosive gas. As the etching gas and cleaning gas in the new generation of electronic industry, carbonyl fluoride has very low greenhouse effect, it is environmental friendly with very low global warming potential and very low atmospheric life (< 1 year).
Quality Specification
| Items | Units | Index |
| Carbonyl fluoride（CF2O）≥ | Vol.% | 99 |
| Oxygen, Argon（O2+Ar）≤ | Vol.ppm | 100 |
| Nitrogen（N2）≤ | Vol.ppm | 1000 |
| Carbon tetrafluoride（CF4）≤ | Vol.ppm | 150 |
| Carbon dioxide（CO2）≤ | Vol.ppm | 2500 |
Application
Carbonyl fluoride is used as cleaning gas and etching gas in electronic industry, it is environmental friendly with very low greenhouse effect. Carbonyl fluoride can also be used as an important fluridizer and fluorous raw material in organic synthesis and inorganic synthesis. Carbonyl fluoride is also an important intermediate in organic synthesis, it is used to produce fluorine plastics or other down-stream product. Carbonyl fluoride can also purify and dry compounds (especially fluorochemicals).
Packaging、Storage
Carbonyl fluoride is stored in standard seamless cylinders, the packing specifications include 10 L and 40 L. Specific packaging specifications can be customized according to user requirements. The product is stored in a shady, dry and ventilated storeroom away from fire and heat source. Protecting against moisture, rain and direct sunlight.
Product Categories : Semiconductor Electronic Chemical Materials > Semiconductor/wafer Cleaning Agent
Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.
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Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.