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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: MolybdenuM(VI) Fluoride MoF6 CAS:7783-77-9
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MolybdenuM(VI) Fluoride MoF6 CAS:7783-77-9 99.9% 3N High Purity
Product introduction
Molybdenum hexafluoride (MoF6) is a kind of white blocky crystal at low temperature, its relative molecular weight is 209.93, melting point is 17.5℃ and boiling point is 35℃, it is sensitive to wet air. Molybdenum hexafluoride can erode a lot of metals (except gold and platinum) and turn the metal surface blue. Molybdenum hexafluoride can be used for isotope separation of molybdenum and it is used in the electronic industry for chemical vapor deposition of molybdenum silicide or molybdenum, in order to produce interconnects and grid electrode with low resistance and high melting point.
Quality Specification| Molybdenum hexafluoride≥ | Vol.% | 99.9 | 99.999 | 99.9995 |
| Carbon tetrafluoride（CF4）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
| Nitrogen（N2）≤ | Vol.ppm | 50 | 1 | 0.5 |
| Oxygen+ Argon.（O2+Ar）≤ | Vol.ppm | 50 | 0.5 | 0.5 |
| Carbon dioxide（CO2）≤ | Vol.ppm | - | 0.5 | 0.5 |
| Carbon monoxide（CO）≤ | Vol.ppm | - | 0.5 | 0.5 |
| Sulfur hexafluoride（SF6）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
| Silicon tetrafluoride（SiF4）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
The main application fields of molybdenum hexafluoride are chemical vapor deposition of molybdenum silicide or molybdenum in microelectronics industry, in order to produce interconnects and grid electrode with low resistance and high melting point. It can also be used as strong fluridizer, film-forming material, ion dopant and molybdenum isotope separation.
Packaging、Storage
Molybdenum hexafluoride is stored in standard seamless cylinders, the packing specifications include 8L and 47L respectively. Specific packaging specifications can be customized according to user requirements. Molybdenum hexafluoride is stored in a shady, dry and ventilated storeroom away from fire and heat source. The storage area shall be equipped with equipment for emergency.
Product Categories : Semiconductor Electronic Chemical Materials > Semiconductor Electronic Chemical Materials
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Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.