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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Sulphur Hexafluoride CAS: 2551-62-4
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Sulphur Hexafluoride CAS: 2551-62-4 SF6 99.999% 5N High-Purity Electronic Special Gas
Product Usage
Sulphur Hexafluoride is a colorless, odorless, non-toxic, non-flammable inert gas with a molecular weight of 146.07, a melting point of -51°C, and a boiling point of -64°C. The molecular structure of sulfur hexafluoride is arranged in an octahedron, the bonding distance is small, and the bonding energy is high, so its stability is high. Electronic grade high-purity sulfur hexafluoride is an ideal etchant. Sulphur Hexafluoride can be used to etch the surface of silicon and remove organic or inorganic membranes on Semiconductor Materials, and can be used in the manufacture of optical fibers.
Quality Specification
| Items | Units | Index |
| （SF6）Sulfur hexafluoride | Vol./% | ≥99.999% |
| Oxygen+Argon（O2+Ar）≤ | Vol.ppm | ≤2 |
| Nitrogen（N2）≤ | Vol.ppm | ≤2 |
| Carbon tetrafluoride（CF4）≤ | Vol.ppm | ≤1 |
| Carbon monoxide（CO）≤ | Vol.ppm | ≤0.5 |
| Carbon dioxide（CO2）≤ | Vol.ppm | ≤0.5 |
| Methane（CH4）≤ | Vol.ppm | ≤0.5 |
| Moisture（H2O）≤ | Vol.ppm | ≤3 |
| Acidity（以HF计）≤ | μg | ≤0.1 |
| Hydrolytic fluoride（以HF计）≤ | μg | ≤0.8 |
| Total impurity content≤ | μg | ≤10 |
| Particle | μg | Supply and demand agreement |
Application
Electronic grade high pure Sulphur Hexafluoride is an ideal electronic etching agent, which is widely used in the field of microelectronics technology, it is used as a plasma etching and cleaning agent in the manufacture of large integrated circuits such as computer chips and LCD. Sulfur hexafluoride is used as a fluorine source to produce fluorine-doped glass in the preparation of optical fiber. In addition, sulfur hexafluoride can also be used as insulating gas, tracer agent and refrigerant.
Packaging、Storage
Sulphur Hexafluoride is stored in standard seamless cylinders, generally cylinder volume is 40L, the type of cylinder is CGA590 QF-2, and cylinder pressure is 8.0MPa and 12.5MPa. Specific packaging specifications can be customized according to user requirements. Sulphur Hexafluoride is stored in a shady and ventilated storeroom away from fire and heat source, temperature of storeroom does not exceed 30℃. It should be separately stored with inflammable (combustible) and oxidizing agent. The storage area shall be equipped with emergency equipment for emergency.
Product Categories : Semiconductor Electronic Chemical Materials > Fluorine-containing High-purity Electronic Special Gas
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Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.