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Model No.: High purity silicon tetrafluoride CAS#: 7783-61-1
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High purity Silicon Tetrafluoride CAS: 7783-61-1 SiF4 99.999%
5N Chemical Electronic Specialty Gases
Product introduction
Silicon tetrafluoride (SiF4) is a kind of colorless, toxic, pungent and smelly gas with a molecular weight of 104.06. Silicon tetrafluoride is easily deliquescent and can produce thick smoke in damp air. Silicon tetrafluoride is soluble in ethanol, ether, nitric acid, hydrofluoric acid, its hygroscopicity is very strong and SiF4 changes into a liquid under pressure, silicon tetrafluoride has a wide range of applications in the electronic industry.
Quality Specification
Items | Units | Index |
Silicon tetrafluoride(SiF4)≥ | Vol.% | 99.999 |
Hydrogen(H2)≤ | Vol.ppm | 1 |
Oxygen + Argon(O2+Ar)≤ | Vol.ppm | 0.5 |
Nitrogen(N2)≤ | Vol.ppm | 4 |
Carbon monoxide(CO)≤ | Vol.ppm | 0.1 |
Carbon dioxide(CO2)≤ | Vol.ppm | 0.3 |
Methane(CH4)≤ | Vol.ppm | 1 |
Hydrogen sulfide(SH2)≤ | Vol.ppm | 0.1 |
Oxygen(O2)≤ | Vol.ppm | 0.1 |
Sulfur dioxide(SO2)≤ | Vol.ppm | 10 |
Total impurity content≤ | Vol.ppm | 1 |
Hexafluorodimethyl silicone ether | Supply and demand agreement | Supply and demand agreement |
As、B、P | Supply and demand agreement | Supply and demand agreement |
Particle | Supply and demand agreement | Supply and demand agreement |
Application
Silicon tetrafluoride is mainly used as p-type dopant, etching agent and epitaxial deposition diffusion silicon source of silicon nitride and tantalum silicide in the electronic industry, and SiF4 can also be used to prepare electronic silane or silicon. In addition, silicon tetrafluoride can be used to produce solar cells, fluorosilicic acid and silicon fluoride, cement and hardener of artificial marble.
Product Categories : Semiconductor Electronic Chemical Materials > Fluorine-containing High-purity Electronic Special Gas
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