Contact Now
Please Leave Us A Message
Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.
Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Hexafluoroethane CAS: 76-16-4 C2F6
Payment Type: L/C,T/T,Paypal
Hexafluoroethane CAS: 76-16-4 C2F6 Hight Purity
99.999% 5N For Semiconductor etchant gas
Product introduction
Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. At normal temperature and pressure, its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Hexafluoroethane is produced by the reaction of R125 and fluorine gas, then obtained electronic grade products after purification and rectification. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.
Quality specification
| Items | Unit | Indexs |
| C2F6 | Vol.% | ≥99.999 |
| O2+Ar | Vol.ppm | ＜1 |
| N2 | Vol.ppm | ＜5 |
| CO | Vol.ppm | ＜0.5 |
| CO2 | Vol.ppm | ＜0.5 |
| H2 | Vol.ppm | ＜0.5 |
| Halohydrocarbon | Vol.ppm | ＜5 |
| CH4 | Vol.ppm | ＜1 |
| H2O | Vol.ppm | ＜2 |
| Acidity（Measured by HF） | Wt. ppm | ＜0.1 |
| Total impurity content | Mol.ppm | ≤10 |
Application
Electronic grade hexafluoroethane is mainly used in the manufacturing process of Semiconductor Materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.
Packaging and storage
Hexafluoroethane is filled in high pressure resistant cylinders that is fitted with brass valves with a matching joint for the CGA type 320 replaceable standard fittings. Packaging specifications can be customized according to customers' requirements.
Product Categories : Semiconductor Electronic Chemical Materials > Fluorine-containing High-purity Electronic Special Gas
Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.
Fill in more information so that we can get in touch with you faster
Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.