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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Octafluoropropane CAS#: 76-19-7
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Xenon difluoride decomposes in neutral or alkaline solutions, and is relatively stable in acidic solutions. The aqueous solution has a pungent odor. Xenon difluoride vapor is colorless and has a nauseating stench. In the electronics industry, XeF2 is often used as an etching gas for silicon. Since the chemical reaction between XeF2 and silicon is a spontaneous reaction, XeF2 has a very high selectivity in the etching process of silicon. In the process of etching silicon by XeF2, XeF2 gas By freely diffusing to the surface of the silicon substrate, and chemically reacting with the outermost silicon atoms to generate gaseous Xe and gaseous SiF4, the corrosion of silicon is realized.
Product parameter
| Xenon difluoride（XeF2）≥ | Vol.% | 99.9 |
| Kalium（K）≤ | mg/kg | 0.18 |
| Calcium（Ca）≤ | mg/kg | 0.15 |
| Sodium（Na）≤ | mg/kg | 0.70 |
| Magnesium（Mg）≤ | mg/kg | 0.12 |
| Aluminum（Al）≤ | mg/kg | 0.17 |
| Zinc（Zn）≤ | mg/kg | 0.30 |
| Iron（Fe）≤ | mg/kg | 1.21 |
| Plumbum（Pb）≤ | mg/kg | 0.07 |
| Cuprum（Cu）≤ | mg/kg | 0.05 |
| Chromium（Cr）≤ | mg/kg | 0.15 |
| （Mn）≤ | mg/kg | 0.04 |
| Manganese（Mo）≤ | mg/kg | 0.15 |
| Nickel（Ni）≤ | mg/kg | 0.83 |
| Phosphorus（P）≤ | mg/kg | 0.14 |
Application
Xenon difluoride is a kind of selective fluridizer, which is widely used in the preparation of inorganic fluoride and organic synthesis, but only in gas phase and non-aqueous solution it can used as fluridizer, and only in aqueous solution it can used as oxidant. In addition, XeF2 is usually used as etching gas of silicon in the electronics industry.
Packaging、Storage
Xenon difluoride is a stable compound and it can be stored in nickel containers or aluminum alloy seamless cylinder for a long time. In order to satisfy the different requirements of scientific research institutes and enterprises, the packaging specifications include 100g, 500g, 1kg, 2kg and 5kg etc. Specific packaging specifications can be customized according to user requirements. Xenon difluoride shall be stored in a shady and ventilated storeroom, separated from the oxidant、 food chemicals、alkali metal, kept away from fire sources.
Product Categories : Semiconductor Electronic Chemical Materials > Semiconductor/Wafer Etching Materials
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