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Shandong Zhongshan Photoelectric Materials Co., Ltd
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Incoterm: FOB,CIF,DDP
C4F6 CAS:685-63-2 Hexafluoro-1 3-Butadiene 99.99% 4N
chip Etching agent
Product Usage
Hexafluoro-1,3-Butadiene(C4F6) is a kind of colorless, odorless, and water insoluble gas. At normal temperature and pressure, its melting point is 132.0 ℃, boiling point is 5.9 ℃.Hexafluoro-1,3-Butadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, Hexafluoro-1,3-Butadienehas higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, Hexafluoro-1,3-Butadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.
Product parameter
| Items | Unit | Index |
| C4F6 | Vol.% | ≥99.99 |
| N2 | Vol.ppm | ≤10 |
| O2+Ar | Vol.ppm | ≤2 |
| H2O | Vol.ppm | ≤3 |
| CO2 | Vol.ppm | ≤10 |
| CO | Vol.ppm | ≤3 |
| Isopropanol | Vol.ppm | ≤5 |
| Other fluorocarbon | Vol.ppm | ≤70 |
| Measured by HF） | Wt.ppm | ≤2 |
Application
Used as etching gas for plasma etching of semiconductor products.
Packaging and storage
Hexafluoro-1,3-Butadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.
Product Categories : Semiconductor Electronic Chemical Materials > Semiconductor/Wafer Etching Materials
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Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.