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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Perfluoropropane CAS: 76-19-7 C3F8
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Perfluoropropane CAS: 76-19-7 Semiconductor Etchant C3F8 High Purity 99.999% 5N Chip Etching Materials
Product introduction
Perfluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. At normal temperature and pressure, its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Octafluoropropane is produced by the reaction of heptafluoropropane and fluorine gas, then obtained electronic grade products after purification and rectification. Electronic grade octafluoropropane is used in Semiconductor Materials and semiconductor device manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer. In addition, because of its high physiological resistance, it is mainly used as a filler and contrast agent after vitreoretinal surgery.
Quality specification
| Items | Unit | Indexs | |
| C3F8 | Vol.% | ≥99.999 | ≥99.9995 |
| O2+Ar | Vol.ppm | ＜1 | ＜0.5 |
| N2 | Vol.ppm | ＜5 | ＜1 |
| CO | Vol.ppm | ＜0.5 | ＜0.5 |
| CO2 | Vol.ppm | ＜0.5 | ＜0.5 |
| CF4 | Vol.ppm | ＜0.5 | ＜0.5 |
| C2F6 | Vol.ppm | ＜0.5 | ＜0.5 |
| CH4 | Vol.ppm | ＜1 | ＜1 |
| H2O | Vol.ppm | ＜1 | ＜1 |
| Acidity (Mesured by HF) | Wt. ppm | ＜0.1 | ＜0.1 |
| Total impurity content | Mol.ppm | ≤10 | ≤5 |
Application
In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.
Packaging and storage
Perfluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.
Product Categories : Semiconductor Electronic Chemical Materials > Semiconductor/Wafer Etching Materials
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Privacy statement: Your privacy is very important to Us. Our company promises not to disclose your personal information to any external company with out your explicit permission.